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High Purity Regulators


Tescom 64-5000 Series

64-5000 Series

The Tescom 64-5000 Series ultra high purity, absolute/subatmospheric pressure reducing regulator, offers inlet pressures of 120, 600, or 3500 psig/ 8.3, 41.4, or 241 bar with outlet pressure ranges from 50 mm Hg absolute – 15 to 100 psig/50 mm Hg absolute – 1.0 to 6.9 bar.

  • Negative bias for controlling vacuum and low positive pressures
  • Metal-to-metal diaphragm to body seal for high leak integrity
  • Hastelloy trim option available155_tescom_logo[1]

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Tescom 64-3600 Series

64-3600 Series

The Tescom 64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, inlet pressures of 600 or 3500 psig/ 41.4 or 241 bar, with outlet pressures up to 150 psig/10.3 bar.

  • Designed to reduce pressure fluctuations in semiconductor gas systems
  • Meets the stringent semiconductor requirements of both point-of-use and cylinder applications
  • Flow Capacity: 0.15 or 0.06155_tescom_logo[1]

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Tescom 64-3200 Series

64-3200 Series

The Tescom 64-3200 Series ultra high purity, high flow tied diaphragm pressure reducing regulator offers maximum flow rates of up to 31.8 SCFM/900 SLPM, with inlet pressures of 150, 1000, 1500 psig/ 10.3, 69.0, 103 bar and outlet pressures up to 200 psig/13.8 bar.

  • Designed for high flow, bulk specialty gas
  • Positive shut-off, tied diaphragm design
  • Captured bonnet
  • Flow Capacity: 1.2155_tescom_logo[1]

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Tescom 64-2800 Series

64-2800 Series

The Tescom 64-2800 Series high purity, tied diaphragm pressure reducing regulator offers Stainless Steel construction with 10 Ra microinch/ 0.25 micrometer surface finish and is electronic grade cleaned. Inlet pressures of 1000 or 3500 psig/69.0 or 241 bar with outlet pressures up to 150 psig/10.3 bar.

  • Positive shutoff minimizes creep
  • Captured bonnet
  • Metal-to-metal diaphragm to body seal for high leak integrity155_tescom_logo[1]

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Tescom 64-2600 Series

64-2600 Series

The Tescom 64-2600 Series economical high purity pressure reducing regulator provides Stainless Steel construction with 10 Ra surface finish and is electronic grade cleaned. Inlet pressures are 600 or 3500 psig/41.4 or 241 bar with outlet pressures of up to 250 psig/17.2 bar.

  • No bias spring or friction device in the flow stream
  • Adjustable stop to limit outlet pressure
  • Positionable ported bonnet ring is available155_tescom_logo[1]

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Tescom 23 Series

23 Series

The Tescom 23 Series ultra high purity in-line regulator offers 10Ra microinch finish with high flow capabilities up to 950 SLPM. The tied diaphragm 23 Series provides an internally springless and threadless design with inlet pressure of 250 psig/17.2 bar and outlet pressure up to 100 psig/6.9 bar.

  • Smooth unobstructed flow path for complete purging
  • Minimized particle generation because of springless and threadless construction
  • Positive shut-off seal with positionable bonnet
  • Flow Capacity: 1.8

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Tescom 449-254 Series

449-254 Series

The Tescom 449-254 Series high purity, high flow pressure reducing regulators are ideal for high pressure bulk specialty gas delivery systems. Inlet pressure is 1500 psig/103 bar, with outlet pressures up to 400 psig/27.6 bar.

  • Its proven design, high outlet capabilities, bubble-tight shutoff valve and standard Hastelloy trim provides dependability required for demanding regulator applications
  • Metal-to-metal sealed diaphragm
  • Flow capacity: 1.0155_tescom_logo[1]

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Tescom 64-3400 Series

64-3400 Series

The Tescom 64-3400 Series dual-stage, ultra high purity pressure reducing regulator offers an inlet pressure of 3500 psig / 241 bar, and outlet pressures up to 150 psig / 10.3 bar.

  • Full internal Electropolish is available
  • Choice of free poppet or tied diaphragm
  • Metal-to-metal body to diaphragm seal for high leak integrity

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Tescom 22-5400 Series

22-5400 Series

The Tescom 22-5400 Series high purity, high flow, BA Grade pressure reducing regulator offers Cv=1.0, and a 316 Stainless Steel Electropolished body of 25Ra. Inlet pressure is 600 psig/41.4 bar, with outlet pressures up to 150 psig/10.3 bar.

  • Compact, hand-loaded and pressure reducing
  • Low internal volume
  • Flow Capacity: 1.0155_tescom_logo[1]

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Tescom 74-3800 Series

74-3800 Series

The Tescom 74-3800 Series ultra high purity, tied diaphragm pressure reducing regulator, offers high flow and internally threadless and low internal volume design. Inlet pressures are 600, 1000, or 3500 psig / 41.3, 69, 241 bar, with outlet pressures up to 150 psig / 10.3 bar.

  • Internally springless and threadless design
  • Smooth unobstructed flow path allows for complete purging
  • Positive shut-off seal, tied diaphragm design with positionable captured vent bonnet
  • Flow Capacity: 0.5155_tescom_logo[1]

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Tescom 22-2200 Series

22-2200 Series

The Tescom 22-2200 Series high purity BA Grade pressure reducing regulator provides 316 Stainless Steel construction with 25 Ra surface finish and is electronic grade cleaned.

  • Metal-to-metal diaphragm to seal for high leak integrity
  • Welded VCR, tube stubs and compression fittings are available
  • Maximum Inlet Pressure: 250 psig/17.2 bar
  • Outlet Pressure Ranges: 30, 60, 100, and 150 psig / 2.1, 4.1, 6.9 and 10.3 bar
  • Flow Capacity: 0.24155_tescom_logo[1]

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Tescom 74-3000 Series

74-3000 Series

The Tescom 74-3000 Series ultra high purity, pressure reducing regulator, offers an internally threadless, and low internal volume design. Inlet pressures are 600, 1000, or 3500 psig / 41.3, 69, or 241 bar with outlet pressures up to 150 psig / 10.3 bar.

  • Smooth unobstructed flow path for complete purging
  • Internally threadless
  • Low internal volume
  • Flow Capacity: 0.5155_tescom_logo[1]

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